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Focus Session 2, Focus Session Invited Speaker

Tohru Sugahara

ISIR Osaka University, Japan
Presenter Bio

I’m Tohru Sugahara, and associate professor at ISIR Osaka University.
I visited to CMST (Centre for Microsystems Technology) imec UGent
(Gent University) for flexible electronics device research on
intelligence carpet tile. The reason why I interested in this research
program is to learn sensing device structures, and how to install print
electrode by our technique in the larg

Abstract: Fabrication and Characterization of Nanomaterial-based Sensor Devices by Metal Organic derived Solution Printing Method
Near future, we will get super smart society (Society 5.0) which a lot of data are gotten form our physical society by IoT technologies with all sensing systems. The big-data in cyber space are optimized and added additional values through AI and ICT technologies, and feedback actionable information to us in the physical space. This concept is calling cyber physical systems (CPS). The CPS will solve all social issues, and develop new economical services and industries through improving productivity. Sensing technologies such as gas sensor, and etc. are very important of the IoT devices in CPS. Sensing with tenuous volatile organic compounds (VOC) gas which contain in human exhalation is important issue for next generation healthcare. In recent years, gas sensors are much attention research topics to synthesis oxide semiconductor nano-materials through fabrication conventional devices product process. In our previous study, MoO3 nanorod arrays growth on the silica substrate with fixed diameters of 10 nm but controllable length of 20 – 600 nm has been successfully synthesized by a simple solution metal organic decomposition (MOD) method[1]. We can be recently successful controlled the thickness of deposited seed layer of MoOx nanorod arrays on the substrate[2]. In addition, TiOx some of nanostructures also growth on the substrate successfully deposited by the MOD method[3]. In this study, we are demonstrating fabrication of some oxide (include MoO3, and TiOx) nanostructure gas sensor device for VOC gas with a very simple printed coating process, and the VOC (such as 1PrOH, EtOH, MeOH, IPA and ACE) gas sensing properties are evaluated by the MoOx and TiOx sensor devices[3,4]. These gas sensors show good response performance with quick response and recovery time, as well as various selectivity of each VOC gas. The relationship between adsorption/desorption abilities with morphology of the nano-structures will be discussed in detail on the symposium.

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